Boron carbonitride thin films by PACVD of single source percursors

Hegemann, DirkDirkHegemannRiedel, R.R.RiedelDreßler, W.W.DreßlerOehr, ChristianChristianOehrSchindler, B.B.SchindlerBrunner, H.H.Brunner2022-03-032022-03-031997https://publica.fraunhofer.de/handle/publica/19002310.1002/cvde.19970030503en610620660548Boron carbonitride thin films by PACVD of single source percursorsjournal article