Knilie, TimTimKnilieKaulfuß, FrankFrankKaulfußWeihnacht, VolkerVolkerWeihnachtPeritsch, PaulPaulPeritschBui Thi, YanaYanaBui ThiZawischa, MartinMartinZawischa2023-11-222023-11-222022https://publica.fraunhofer.de/handle/publica/4571552-s2.0-85137273516During component coating already deposited particles are incorporated into the growing layer and continuously deposited on the surface. There a characteristic defect growth structure is formed, which is reflected in a particle surface as well as a roughness. In this work, it is shown that the production of doped carbon films using composite cathodes leads to a significant reduction in arc-induced particle emission. While Part 1 covered origins of growth defects, methods of surface characterization, experimental setups and measurement methods, the final part of the article delivers the measurement results and highlights the conclusions.enjournal article