Co-sputtering of rugate filters of reduced loss and roughness

Taeschner, KerstinKerstinTaeschnerBartzsch, HagenHagenBartzschHerffurth, TobiasTobiasHerffurthSchröder, SvenSvenSchröderDuparre, AngelaAngelaDuparreFrach, PeterPeterFrach2022-03-122022-03-122014https://publica.fraunhofer.de/handle/publica/384688enmagnetron sputteringoptical coatingrugate filterelectron scatteringsurface roughness620620667670Co-sputtering of rugate filters of reduced loss and roughnessconference paper