Weiße, J.J.WeißeHauck, M.M.HauckKrieger, M.M.KriegerBauer, A.J.A.J.BauerErlbacher, T.T.Erlbacher2022-03-062022-03-062019https://publica.fraunhofer.de/handle/publica/26023010.1063/1.5118666en670620530Publisher's Note: "Aluminum acceptor activation and charge compensation in implanted p-type 4H-SiC" [AIP Advances 9, 055308 (2019)]journal article