Investigation of dynamic behaviour of advanced micromirror array designs used for particular applications by modelling and simulation using analytical and numerical methods respectively and comparsion to experiment

Schmeißer, D.Schenk, H.Noga, M.B.M.B.Noga2022-03-072022-03-072010https://publica.fraunhofer.de/handle/publica/278693en621Investigation of dynamic behaviour of advanced micromirror array designs used for particular applications by modelling and simulation using analytical and numerical methods respectively and comparsion to experimentmaster thesis