Kaiser, N.N.Kaiser2022-03-032022-03-031996https://publica.fraunhofer.de/handle/publica/188482High-performance multilayer coatings for the ultraviolet spectral region that ensure the optical performance required in harsh industrial conditions have been developed. Objective was the enhancement of reliability and availability of complex UV-photon machining and measuring systems. It as been shown that it is possible to adapt the UV-laser beam shape with high efficiency to specific applications by properly designed interference coatings.enDünne optische Schichtexcimer laser opticsfluoride thin filmsFluoridschichtlaser induced damage thresholdLaserzerstörschwelleoptical coatingoptical thin filmsoxide thin filmsOxidschichtultraviolet spectral regionultravioletter SpektralbereichUV620journal article