Schulz, B.B.Schulz2022-03-102022-03-102006https://publica.fraunhofer.de/handle/publica/351430An essential aim of the German joint research project MIMS is the integration of three-dimensional measurement in a highest-precision system for micro-assembly. One important step in the sub-project of Fraunhofer IWU is the investigation of useable micro-actuator principles for gripper integrated position correction, to realize a high-precise component alignment directly in the working space of a micro-assembly system in addition to the 3D-measuring. The solution concept bases on the development of a novel gripping module, that joins the functions of a precision gripper and a measuring head. The first developed prototype enables the safe handling of sensible electric-optical devices with pairwise arranged micro-finger grippers and allows the adjusting and holding of minimum angle positions (down to 0.004°) for high-precise alignment with the help of a new developed solid state hinges structure. The paper presents first testing results and shows the specified MIMS-concept to integrate the gripping unit in a high-precision 5axis-positioning system by LPKF.deMIMSMontageintegrierte Multisensor 3D-MesstechnikMikromontageWinkellagekorrekturPräzisionsgreiferTiltfunktionBiegegelenkanordnungassembly integrated multi-sensor 3D-measurementmicro assemblyangle correctionangle adjustmentprecision grippertilt functionsolid state hinge620670conference paper