Klages, C.-P.C.-P.KlagesBerger, C.C.BergerEichler, M.M.EichlerNagel, K.K.NagelThomas, M.M.Thomas2022-03-102022-03-102006https://publica.fraunhofer.de/handle/publica/351111en667Atmospheric-pressure plasma deposition of coating in microchannelsconference paper