Spur, G.G.SpurUhlmann, E.E.UhlmannHoll, S.-E.S.-E.HollDaus, N.-A.N.-A.Daus2022-03-092022-03-091999https://publica.fraunhofer.de/handle/publica/333845en670Influences on surface and subsurface during ultrasonic assisted grinding of advanced ceramicsconference paper