Parylene C Deposition and Characterization of its Barrier Properties for the Encapsulation of MEMS for Medical Applications

Selbmann, FranzFranzSelbmannBaum, MarioMarioBaumWiemer, MaikMaikWiemerGeßner, ThomasThomasGeßner2022-03-132022-03-132016https://publica.fraunhofer.de/handle/publica/3920332-s2.0-84976313975enParylene C Deposition and Characterization of its Barrier Properties for the Encapsulation of MEMS for Medical Applicationsconference paper