RF-plasma treatment on the inside of small functional devices for biomedical application

Oehr, C.C.OehrHegemann, D.D.HegemannMüller, MichaelMichaelMüllerVohrer, UweUweVohrerStorr, M.M.Storr2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/35000410.1002/3527605584.ch23en610620660RF-plasma treatment on the inside of small functional devices for biomedical applicationconference paper