Beyer, E.E.BeyerBehler, K.K.BehlerHerziger, G.G.Herziger2022-03-082022-03-081992https://publica.fraunhofer.de/handle/publica/302740Device for processing workpieces using energy-rich radiation, in particular laser radiation, comprising a lens system focussing the radiation on the workpiece and a device placing the area of interaction between the radiation and workpiece under a vacuum. In order to improve handling of the workpiece and in particular to improve handling of continuous workpieces or workpiece tracks, the device is designed so that the vacuum device has an opening causing a vacuum locally limited to the machining area.de608667621671patent1988-3824047