Bergner, AlexanderAlexanderBergnerMunser, Anne-SophieAnne-SophieMunserHerffurth, TobiasTobiasHerffurthSchröder, SvenSvenSchröderTrost, MarcusMarcusTrost2023-02-012023-02-012022https://publica.fraunhofer.de/handle/publica/43471310.1364/OIC.2022.TD.12-s2.0-85139097844The optical performance of coatings critically depends on the surface roughness, defects, and particles on the substrate. These imperfections can be elegantly characterized by light scattering, which also enables the characterization of freeform surfaces.enLight scatteringRoughness, particle, and defect analysis of freeform surfacesconference paper