Schmitt, RobertRobertSchmittKoerfer, FriedelFriedelKoerferBichmann, StephanStephanBichmann2022-03-042022-03-042008https://publica.fraunhofer.de/handle/publica/21583610.1524/teme.2008.0832This paper presents the findings of the project "virtual interference microscope". A simulation environment for optical measurement systems, especially for interference microscopes based on white-light interferometry, was designed at the Fraunhofer IPT. A raytracing module is basis for these simulations. This module maps the physical and optical path lengths. With this simulation environment the effects of external influences on the measurement result can by analyzed.de658681journal article