Oliva, MariaMariaOlivaMichaelis, DirkDirkMichaelisFuchs, FrankFrankFuchsTünnermann, AndreasAndreasTünnermannZeitner, Uwe DetlefUwe DetlefZeitner2022-03-042022-03-042013https://publica.fraunhofer.de/handle/publica/23239810.1063/1.4807764A resonance domain blazed grating, composed of an effective medium structure and a subsequent mode conversion layer, is designed, fabricated, and characterized. Due to the demanding high aspect ratio geometries, a technological approach for multilevel structures, assisted by atomic layer deposition technology, has been developed. The measured efficiency of about 90% exhibits the largest value yet reported for a multi-level fused silica transmission grating in the resonance domain, operating at non Littrow mounting, close to normal incidence.enatomic layer depositiondiffraction gratingslight transmissionoptical design techniquesoptical fabricationsilicon compounds620621Highly efficient broadband blazed grating in resonance domainjournal article