Hegemann, D.D.HegemannSchütz, U.U.SchützOehr, C.C.Oehr2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/35000310.1002/3527605584.ch2en610620660RF-plasma deposition of SiOx and a-C:H as barrier coatings on polymersconference paper