Nanoscale deformation measurements - concepts for failure and reliability assessment at the nanoscale

Michel, B.B.MichelGollhardt, A.A.GollhardtKeller, J.J.Keller2022-03-102022-03-102008https://publica.fraunhofer.de/handle/publica/361009en621Nanoscale deformation measurements - concepts for failure and reliability assessment at the nanoscaleconference paper