Specht, H.H.SpechtKurth, S.S.KurthGessner, T.T.GessnerFiess, R.R.FiessKrayl, O.O.KraylKrueger, M.M.KruegerWiest, G.G.WiestHilberath, T.T.Hilberath2022-03-082022-03-082011https://publica.fraunhofer.de/handle/publica/309724The method involves generating the steerable and modulatable light beams (220) by a light beam generating unit (200). The test images (240) of a movable micro-mirror (210) are generated by deflecting the movable micro-mirror and by modulating the light beams directed towards the micro-mirror. The upper edge, lower edge, right edge and left edge of test image are detected by a surface sensor (250). The function parameters such as mechanical parameters and image quality parameters of micro-mirror are determined by an evaluating device (260), based on detected portions of test image. Independent claims are included for the following: (1) device for characterizing movable micro-mirror; and (2) computer program for characterizing movable micro-mirror.de621patent102010003080102010003608