Mask modeling in the low k1 and ultrahigh NA regime: phase and polarization effects

Erdmann, A.A.Erdmann2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/34933210.1117/12.6372852-s2.0-285444492602-s2.0-336446103342-s2.0-27744464953en670620530Mask modeling in the low k1 and ultrahigh NA regime: phase and polarization effectsconference paper