Maryasov, O.O.MaryasovJuschkin, L.L.Juschkin2022-03-052022-03-052016https://publica.fraunhofer.de/handle/publica/247371Tabletop extreme ultraviolet (EUV) scatterometer MARYS has been brought into operation in 2015. Reported here are the first results of grazing incidence EUV scattering experiments on periodic rough surfaces utilizing a high-brightness DPP source FS-5420 with pulse frequency up to 1500 Hz and EUV pulse energy up to 14 mJ into 2p steradian (13.5 nm, 2% bw). High sensitivity of EUV scatterometry allowed to record up to 15 diffraction orders at grazing reflection from a test gold coated holographic reflecting grating. From recorded scattering patterns it is possible to extract information on surface roughness and parameters of periodic structures with high precision.enbook article