Neff, W.W.NeffRothweiler, D.D.RothweilerEidmann, K.K.EidmannLebert, R.R.LebertRichter, F.F.RichterWinhart, G.G.Winhart2022-03-092022-03-091994https://publica.fraunhofer.de/handle/publica/322718Experimental results on radiative properties of laser produced and pinch plasmas are discussed in comparison and with respect to the specific sets of requirements defined by proximity printing x-ray lithography and full field imaging x-ray microscopy.enlithographymonochromaticityradiation sourceradiemetryrecombinationsynchrotron621Laser and pinch plasma X-ray sources for microscopy and lithographyconference paper