Wöllenstein, J.J.WöllensteinBöttner, H.H.BöttnerPlaza, J.A.J.A.PlazaCane, C.C.Cane2022-03-092022-03-092002https://publica.fraunhofer.de/handle/publica/3411392-s2.0-1542331704We present a new silicon micromachined low power heater platform comprising sensor arrays which feature a number of different gas sensitive metal oxides. The sensing elements of the arrays are composed of alternatively n-type SnO/sub 2/, n-type WO/sub 3/, n-type ZnO, p-type Cr/sub 1.8/Ti/sub 0.2/O/sub 3+z/ or n-type V/sub 2/O/sub 5/. Characterisation of the arrays under trace gas exposure is presented.enmicromachined metal oxide gas sensor arraymetal oxide gas sensor arraySi micromachined heater platformlow power heater platformgas sensitive metal oxiden-typemicrohotplateSiZnOCrTiO621conference paper