Scherge, M.M.Scherge2022-03-042022-03-042014https://publica.fraunhofer.de/handle/publica/23555510.1007/978-3-642-22647-2_245Microtribology - considered as the mechanical interaction of moving bodies - is the science of friction, adhesion, lubrication, and wear on the length scale of micrometers to nanometers and the force scale of millinewtons (mN) to nanonewtons (nN).entribology of microsystems620book article