Strategies for rapid and reliable fabrication of microoptical structures using two-photon polymerization

Steenhusen, SönkeSönkeSteenhusenHasselmann, SebastianSebastianHasselmannDomann, GerhardGerhardDomann2022-03-132022-03-132017https://publica.fraunhofer.de/handle/publica/39757610.1117/12.2252913en3D-DruckAdditive FertigungLaserbearbeitungLithographieMikrooptikMikrolinsenPolymereRasterelektronenmikroskopie (REM)Strategies for rapid and reliable fabrication of microoptical structures using two-photon polymerizationconference paper