Grimme, R.R.GrimmeKahlden, T. vonT. vonKahlden2022-03-082022-03-081993https://publica.fraunhofer.de/handle/publica/321371Cleanromms are used in a wide range of applications. Areas of cleanrooms are from LF-boxes up to a few thousands of qm. All the cleanrooms have to be certified after construction and during their operation. In this paper the certification procedure like VDI-2083-part 3 is discussed.deAirborne ParticleMessenPartikelmessungReinraumstandartizationTeilchenVDI Richtlinie670conference paper