Nanocalorimetric devices with thermoelectric PECVD p-Si1-xGex thin film layers for the analysis of biological phase transitions

Böttner, H.H.BöttnerJägle, M.M.JägleKünzel, C.C.KünzelBenkendorf, M.M.BenkendorfVetter, M.M.VetterAuer, P.P.AuerLambrecht, A.A.Lambrecht2022-03-092022-03-092003https://publica.fraunhofer.de/handle/publica/342630de621Nanocalorimetric devices with thermoelectric PECVD p-Si1-xGex thin film layers for the analysis of biological phase transitionsconference paper