Azhdast, M.H.M.H.AzhdastEichler, H.J.H.J.EichlerLang, K.-D.K.-D.LangGlaw, V.V.Glaw2022-03-132022-03-132016https://publica.fraunhofer.de/handle/publica/39554110.1364/CLEO_AT.2016.ATh1K.7In this research, different laser parameters is investigated using Nd:YAG Picosecond laser to sputter nano particles on Si-Wafer substrate. Furthermore, the influence of various parameters on adhesion tests and mechanism of deposited layer is studied.enconference paper