Pompe, W.W.PompeGorbunov, A.A.A.A.GorbunovBaranovka, G.K.G.K.BaranovkaKlassen, N.V.N.V.KlassenKonov, V.I.V.I.KonovKulakov, M.P.M.P.KulakovProkhorov, A.M.A.M.ProkhorovWeiß, H.-J.H.-J.WeißScheibe, H.J.H.J.Scheibe2022-03-032022-03-031990https://publica.fraunhofer.de/handle/publica/179243Laser pulse vapour deposition of carbon and gold films was performed by means of an excimer laser with uniform flux distribution across the spot. Structural and IR optical properties were investigated. The carbon film turned out to be suitable for coatings on IR optics elements, e.g. antireflection coatings on ZnSe.enantireflection coatingAntireflexionsschichtDLC-filmlaser-induced film evaporationlaser pulse vapor depositionLaserimpulsgasphasenabscheidunglaserinduzierte VerdampfungLPVDreflection measurement667621671541journal article