Design and fabrication of single, smooth and broadband chirped mirrors with a top nano-porous layer

Ma, P.P.MaSzeghalmi, A.A.SzeghalmiSchulz, U.U.SchulzRickelt, F.F.RickeltBeladiya, V.V.BeladiyaZimmermann, P.P.ZimmermannLi, L.L.Li2022-03-142022-03-142019https://publica.fraunhofer.de/handle/publica/41113110.1364/OIC.2019.ThB.3The design and fabrication results of single, low-ripples and broadband chirped mirrors with an integrated nano-porous layer using two different processes, atomic layer deposition and plasma etching, will be presented.en620Design and fabrication of single, smooth and broadband chirped mirrors with a top nano-porous layerconference paper