The development path of electrostatic resonant to electrostatic quasistatic driven micro scanning mirrors

Grahman, JanJanGrahmanJung, DenisDenisJungKallweit, DavidDavidKallweitSandner, ThiloThiloSandnerGraßhoff, ThomasThomasGraßhoffSchenk, HaraldHaraldSchenk2022-03-122022-03-122012https://publica.fraunhofer.de/handle/publica/377913en621The development path of electrostatic resonant to electrostatic quasistatic driven micro scanning mirrorsconference paper