Simulation and experimental study of gray-tone lithography for the fabrication of arbitrarily shaped surfaces

Henke, W.W.HenkeHoppe, W.W.HoppeQuenzer, H.J.H.J.QuenzerStaudt-Fischbach, P.P.Staudt-FischbachWagner, B.B.Wagner2022-03-092022-03-091994https://publica.fraunhofer.de/handle/publica/32311510.1109/MEMSYS.1994.555624en621Simulation and experimental study of gray-tone lithography for the fabrication of arbitrarily shaped surfacesconference paper