Comparative study on micromorphology and humidity sensitive properties of thin-film and thick-film humidity sensors based on semiconducting MnWO4

Qu, W.M.W.M.QuWlodarski, W.W.WlodarskiMeyer, J.U.J.U.Meyer2022-03-032022-03-032000https://publica.fraunhofer.de/handle/publica/19662310.1016/S0925-4005(99)00487-62-s2.0-0002221782en610620541Comparative study on micromorphology and humidity sensitive properties of thin-film and thick-film humidity sensors based on semiconducting MnWO4journal article