Front-end junction and contact formation in future silicon/germanium based devices. Preface

Cristianoa, F.F.CristianoaLauwers, A.A.LauwersPichler, P.P.PichlerFeudel, T.T.FeudelWindil, W.W.Windil2022-03-102022-03-102008https://publica.fraunhofer.de/handle/publica/35948710.1016/j.mseb.2008.10.0222-s2.0-57049087027en670620Front-end junction and contact formation in future silicon/germanium based devices. Prefaceconference paper