AR-hard broadband antireflective coatings generated by a controlled needle-optimization technique

Schulz, U.U.SchulzKaiser, N.N.KaiserSchallenberg, U.U.Schallenberg2022-03-102022-03-102004https://publica.fraunhofer.de/handle/publica/344668en620AR-hard broadband antireflective coatings generated by a controlled needle-optimization techniqueconference paper