Anode effects on energetic particle bombardment of the substrate in pulsed magnetron sputtering

Bartzsch, H.H.BartzschFrach, P.P.FrachGoedicke, K.K.Goedicke2022-03-032022-03-032000https://publica.fraunhofer.de/handle/publica/19783110.1016/S0257-8972(00)00861-6en667670620543Anode effects on energetic particle bombardment of the substrate in pulsed magnetron sputteringjournal article