Breza, J.2022-03-022022-03-022018978-1-5386-7490-1978-1-5386-7489-5978-1-5386-7491-8978-1-5386-7488-8https://publica.fraunhofer.de/handle/publica/16532812th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM 2018. Conference Proceedings