New quantitative line scanning technique for homogeneity assessment of semi-insulating GaAs wafers

Baeumler, MartinaMartinaBaeumlerKaufmann, U.U.KaufmannWindscheif, J.J.Windscheif2022-03-022022-03-021985https://publica.fraunhofer.de/handle/publica/17284610.1063/1.95913enGalliumarsenidHomogenitaets-KontrolleInfrarotabsorption621667New quantitative line scanning technique for homogeneity assessment of semi-insulating GaAs wafersjournal article