Stenzel, O.O.StenzelWilbrandt, S.S.WilbrandtKaiser, N.N.Kaiser2022-03-132022-03-132015https://publica.fraunhofer.de/handle/publica/39129910.1117/12.2196197Oxide coatings have been prepared by PIAD by means of a Leybold Syrus pro 1100 deposition system. Focus was placed on tantalum pentoxide, hafnium oxide, and zirconium oxide films. Coating characterization pursued the determination of the refractive index in the VIS/UV spectral regions, as well as the geometrical film thickness. In situ spectrophotometry was used to obtain information about the shift of the coatings. Measurements of the coating stress as well as EDX characterization have further been performed to complete the picture. Results are presented which provide information about the correlation between deposition parameters (Assistance, choice of working gas) and the optical properties of the films. Correlations between optical and non-optical (stress, EDX-results) properties are further presented and discussed in terms of classical models. Reproducibility issues are discussed, too.enconference paper