Under CopyrightJank, MichaelMichaelJankBauer, AntonAntonBauerFrey, LotharLotharFrey2022-03-1326.7.20162016https://publica.fraunhofer.de/handle/publica/39256210.24406/publica-fhg-392562ennanomaterialsintegrated circuitprocessingdevicesnanodevicesassembly670620530Prospects and issues of nanomaterials use in microelectronicsposter