Femtosecond laser nanomachining of silicon wafers and two-photon nanolithography for stem cell research

König, K.K.KönigBauerfeld, F.F.BauerfeldSauer, D.D.SauerSchuck, H.H.SchuckUchugonova, A.A.UchugonovaLei, E.E.LeiStark, M.M.StarkVelten, T.T.VeltenBückle, R.R.BückleHarzic, R. leR. leHarzic2022-03-102022-03-102007https://publica.fraunhofer.de/handle/publica/355847en610620Femtosecond laser nanomachining of silicon wafers and two-photon nanolithography for stem cell researchconference paper