Kurth, S.S.KurthKehr, K.K.KehrKaufmann, C.C.KaufmannFaust, W.W.FaustDötzel, W.W.DötzelMichel, B.B.Michel2022-03-092022-03-092000https://publica.fraunhofer.de/handle/publica/336274en621Deformation behavior of micro mirror arrays under optical powerconference paper