Hünermann, L.L.HünermannMeyer, R.R.MeyerRichter, F.F.RichterSchnase, A.A.Schnase2022-03-082022-03-081991https://publica.fraunhofer.de/handle/publica/318594In this work excimer Laser excitation with resonant microwave structures was obtained both for XeCl and KrF. The discharge tube containing the laser gas is placed inside one or several coupled microwave resonators. Depending on the microwave structure laser pulse energies up to the mJ-range were achieved with XeCl.encavityfrequencymicrowaveoscilloscopepowerpressurepulsepumped laserresonator621conference paper