Title

Laser micromachining for optoelectronics device fabrication

Title Supplement

30 October 2002, Brugge, Belgium

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2003

Series

Proceedings of SPIE; 4941

ISBN

0-8194-4736-6

Conference