Title

Ultra clean processing of semiconductor surfaces X

Title Supplement
Selected, peer reviewed papers from the 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 20 - 22, 2010, Ostend, Belgium
Person Involved
Corporate Author
Interuniversity Micro-Electronics Center -IMEC-, Louvain
Publisher
Publishing Place
Durnten-Zurich
Publication Date
2012
Series
Solid state phenomena; 187
ISSN
1012-0394
ISBN
978-3-03-785388-7
Conference