Title

Smart Sensors, Actuators, and MEMS II

Title Supplement

9-11 May 2005, Sevilla, Spain

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2005

Series

Proceedings of SPIE; 5836

ISBN

0-8194-5831-7

Conference