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Smart Sensors, Actuators, and MEMS II
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Title
Smart Sensors, Actuators, and MEMS II
Titel Supplements
9-11 May 2005, Sevilla, Spain
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
2005
Serie
Proceedings of SPIE
Konferenz
Conference "Microtechnologies for the New Millennium" 2005