Title

CMOS Front-End Materials and Process Technology

Title Supplement

Symposium held April 22 - 24, 2003, San Francisco, California, U.S.A.. Materials Research Society, Spring Meeting, Symposium D

Person Involved

Corporate Author

Materials Research Society -MRS-

Publisher

Publishing Place

Pittsburgh, Pa.

Publication Date

2003

Series

Materials Research Society Symposium Proceedings; 765

ISBN

1-558-99702-4

Conference