Title

Ion Implantation Technology 2012. 19th International Conference on Ion Implantation Technology. Proceedings

Title Supplement

25-29 June 2012, Valladolid, Spain

Person Involved

Corporate Author

American Institute of Physics -AIP-, New York

Publisher

Publishing Place

Woodbury, N.Y.

Publication Date

2012

Series

AIP Conference Proceedings; 1496

ISBN

978-0-7354-1108-1

978-0-7354-1109-8

Conference