Title

International Symposium on Microelectronics 2002. Proceedings

Title Supplement

September 4 - 6, 2002, Colorado Convention Center, Denver, CO

Corporate Author

International Microelectronics and Packaging Society -IMAPS-

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Washington, D.C.

Publication Date

2002

Series

Proceedings of SPIE; 4931

ISBN

0-930815-66-1

Conference