Title

Geometrical measurements in the micro- and nanometre range with far and near field methods

Person Involved

Corporate Author

Physikalisch-Technische Bundesanstalt -PTB-, Braunschweig

Publisher

Wirtschaftsverlag NW

Publishing Place

Bremerhaven

Publication Date

1998

Series

PTB-Berichte: Fertigungsmeßtechnik; F-34

ISBN

3-89701-280-4