Title

IEEE/CPMT/SEMI 28th International Electronics Manufacturing Technology Symposium 2003. CD-ROM

Title Supplement

July 16 - 18, 2003, the Marriott Hotel, San Jose, CA, USA. Proceedings

Person Involved

Corporate Author

Institute of Electrical and Electronics Engineers -IEEE-

Components, Packaging and Manufacturing Technology Society -CPMT-

Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.

Publisher

Publishing Place

Piscataway, NJ

Publication Date

2003

ISBN

0-7803-7934-9

Conference